Estimation of elastic constants mass density and thickness of thin films from saw velocity dispersion

Abstract

The paper describes a method of estimating the elastic constants, mass density and thickness of a thin film fabricated on a substrate. The method is substantially based on fitting simplified theoretical SAW velocity dispersion to experimental dispersion data by non-linear least squares. The result has shown that when the film thickness is large, or when the film thickness or the longitudinal wave velocity is known, other material constants can be estimated without much difficulty. © 1990 The Japan Society of Applied Physics.