Abstract
In operating a rotating-analyzer ellipsometer one must know the plane of incidence accurately. We present a new calibration method, phase calibration, which is complementary to residue calibration Phase calibration is shown to be superior to the residue method for Δ 5π/6.
Cite
CITATION STYLE
APA
de Nijs, J. M. M., Holtslag, A. H. M., Hoeksta, A., & van Silfhout, A. (1988). Calibration method for rotating-analyzer ellipsometers. Journal of the Optical Society of America A, 5(9), 1466. https://doi.org/10.1364/josaa.5.001466
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