Self-consistent analysis of low temperature oxygen plasma and processes of its interaction with some polymer materials

Abstract

Self-consistent model of glow discharge plasma in oxygen is discussed. The model is based on simultaneous solution of the Boltzmann equation, equations of charged and neutral particles balance, vibrational kinetics equations for O2(X3Σ,V) molecules and heat-transfer equation. Model discussed allows to calculate intrinsic plasma properties on the base of its external parameters with acceptable accuracy. Results of experimental investigation of polymers plasmolysis are presented. Some aspects of oxygen plasma interaction with polymers are discussed on the base of experimental data and modelling results.