Abstract
A novel MEMS gyroscope is presented, which blends the best aspects of traditional tuning fork gyroscopes with modern whole-angle capable designs such as rings and disks. The gyroscopes were fabricated in both silicon and silicon carbide. The resonators were measured to have quality factors of 120,000 (SiC) and 260,000 (Si), and frequency splits of 0.08% (SiC) and 0.24% (Si). Open loop rate mode gyroscope operation was demonstrated on both gyroscopes.
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CITATION STYLE
Cook, E., Tomaino-Iannucci, M., Bernstein, J., Weinberg, M., Choy, J., Hobart, K., … Kenny, T. (2018). A high-mass, eight-fold symmetric silicon carbide MEMS gyroscope. In 2018 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2018 (pp. 364–365). Transducer Research Foundation. https://doi.org/10.31438/trf.hh2018.102
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