Atomic layer deposition grown hafnia nanotubes functionalized with gold nanoparticle composites

Abstract

Tetrakis(dimethylamido) hafnium(IV) (TDMAHf) precursor and water vapor as an oxidant were employed to synthesize hafnia (HfO2). Atomic layer deposition (ALD) was used to fabricate highly ordered hafnia nanotubes within the tubular channels of macro-porous silicon (Si) templates. Subsequently, the hafnia nanotubes were harvested from the porous Si template by chemical dissolution of the Si matrix using aqueous NaOH.We synthesized gold-polymer composite from 35 nm diameter gold nanoparticles (AuNPs) modified with 11-mercaptoundecanoic acid in order to functionalize the surface of the ALD grown HfO2 nanotubes. Scanning electron microscopy (SEM) and transmission electron spectroscopy (TEM) were used for physical analysis in order to characterize the morphology of the Si template, the AuNPs and the resultant HfO2 tubes functionalized with gold nanoparticles. © 2013 The Electrochemical Society.