High-coercive-force rare-earth alloy films by getter sputtering

Abstract

Thin films of the rare-earth alloys of the CoSingle Bond signSm system with and without the addition of Cu have been found to have exceptionally high coercive forces. A coercive force of 30 000 Oe was realized with Co 3.65Cu1.35Sm films, 4000-Å thick prepared at a substrate temperature of 500°C using getter sputtering. This technique avoids troublesome oxidation problems usually encountered in preparing films of active materials such as the rare-earth compounds. © 1969 The American Institute of Physics.