High-speed plasma measurements with a plasma impedance probe

Abstract

Plasma impedance probes (PIPs) are a type of RF probe that primarily measures electron density. This work introduces two advancements: a streamlined analytical model for interpreting PIP-monopole measurements and techniques for achieving ≥ 1 MHz time-resolved PIP measurements. The model’s improvements include introducing sheath thickness as a measurement and providing a more accurate method for measuring electron density and damping. The model is validated by a quasi-static numerical simulation, which compares the simulation with measurements, identifies sources of error, and provides probe design criteria for minimizing uncertainty. The improved time resolution is achieved by introducing higher-frequency hardware, updated analysis algorithms, and a more rigorous approach to RF calibration. Finally, the new model and high-speed techniques are applied to two datasets: a 4 kHz plasma density oscillation resolved at 100 kHz with densities ranging between 2 × 1014 and 3 × 1015 m−3, and a 150 kHz oscillation resolved at 4 MHz with densities ranging between 4 × 1014 and 6 × 1014 m−3