Journal ArticleOPEN ACCESS

THIN FILM CHARACTERIZATION.

Solid State Technology (1986) 29(11) 135-140
DOI: 10.1007/978-3-658-35926-3_5
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Abstract

This article presents an overview of methods of measuring and analyzing structural, mechanical, and compositional properties of thin films. It contains a discussion of the importance of these properties for the utilization of thin films in electron devices.

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Smith, J. F., & Hinson, D. C. (1986). THIN FILM CHARACTERIZATION. Solid State Technology, 29(11), 135–140. https://doi.org/10.1007/978-3-658-35926-3_5

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