Synthesis of large-area MoS 2 atomic layers with chemical vapor deposition

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Abstract

Large-area MoS 2 atomic layers are synthesized on SiO 2 substrates by chemical vapor deposition using MoO 3 and S powders as the reactants. Optical, microscopic and electrical measurements suggest that the synthetic process leads to the growth of MoS 2 monolayer. The TEM images verify that the synthesized MoS 2 sheets are highly crystalline. Copyright © 2012 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

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Lee, Y. H., Zhang, X. Q., Zhang, W., Chang, M. T., Lin, C. T., Chang, K. D., … Lin, T. W. (2012). Synthesis of large-area MoS 2 atomic layers with chemical vapor deposition. Advanced Materials, 24(17), 2320–2325. https://doi.org/10.1002/adma.201104798

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