Abstract
Contrast levels in backscattered SEM images were investigated, utilising stage deceleration for low voltage imaging and also electron energy filtering. Image contrast variations are explained via use of Monte Carlo simulations which can predict the optimum accelerating and filter voltages for imaging complex sample mixtures.
Cite
CITATION STYLE
APA
Lewis, P., Micklethwaite, S., Harrington, J., Dixon, M., Brydson, R., & Hondow, N. (2015). Exploring backscattered imaging in low voltage FE-SEM. In Journal of Physics: Conference Series (Vol. 644). Institute of Physics Publishing. https://doi.org/10.1088/1742-6596/644/1/012019
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