Atomic layer deposition of W on nanoporous carbon aerogels

Abstract

In this study, the authors demonstrate the ability to apply precise, conformal W coatings onto all surfaces of nanoporous carbon aerogels using atomic layer deposition (ALD). The resulting material has a filamentous structure in which the W completely encapsulates the carbon aerogel strands. The material mass increases nonlinearly with W coating, achieving a tenfold increase following ten ALD cycles. The aerogel surface area increases by nearly a factor of 2 after ten W ALD cycles. This conformal metal coating of extremely high aspect ratio nanoporous materials by ALD represents a unique route to forming metal functionalized high surface area materials. © 2006 American Institute of Physics.