Comment on "Heat transfer in vacuum packaged microelectromechanical system devices" [Phys. Fluids 20, 017103 (2008)]

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Abstract

It is pointed out that the solution of a free molecular gas in a bounded domain proposed as speculation in Sec. II of Cai [Phys. Fluids20, 017103 (2008)] and in Sec. II of Cai and Liu [Phys. Fluids20, 067105 (2008)] and its result of the vanishing of flow velocity were rigorously derived under a more general situation and boundary condition more than 20 years ago. © 2009 American Institute of Physics.

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Sone, Y. (2009). Comment on “Heat transfer in vacuum packaged microelectromechanical system devices” [Phys. Fluids 20, 017103 (2008)]. Physics of Fluids. American Institute of Physics Inc. https://doi.org/10.1063/1.3266878

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