One-dimensional hybrid model of plasma-solid interaction in argon plasma at higher pressures

Abstract

One of problems important in the present plasma science is the surface treatment of materials at higher pressures, including the atmospheric pressure plasma. The theoretical analysis of processes in such plasmas is difficult, because the theories derived for collisionless or slightly collisional plasma lose their validity at medium and high pressures, therefore the methods of computational physics are being widely used. There are two basic ways, how to model the physical processes taking place during the interaction of plasma with immersed solids. The first technique is the particle approach, the second one is called the fluid modelling. Both these approaches have their limitations-small efficiency of particle modelling and limited accuracy of fluid models. In computer modelling is endeavoured to use advantages by combination of these two approaches, this combination is named hybrid modelling. In our work one-dimensional hybrid model of plasma-solid interaction has been developed for an electropositive plasma at higher pressures. We have used hybrid model for this problem only as the test for our next applications, e.g. pulsed discharge, RF discharge, etc. The hybrid model consists of a combined molecular dynamics-Monte Carlo model for fast electrons and fluid model for slow electrons and positive argon ions. The latter model also contains Poisson's equation, to obtain a self-consistent electric field distribution. The derived results include the spatial distributions of electric potential, concentrations and fluxes of individual charged species near the substrate for various pressures and for various probe voltage bias. © 2007 IOP Publishing Ltd.