Dynamics of Ar metastable and resonance states in pulsed capacitively coupled plasmas

Abstract

The experimental and theoretical study of radiofrequency capacitively coupled plasma discharge afterglow has been carried out. Temporal dynamics of Ar metastable and resonance states densities are measured by the absorption method with separate capacitive discharge as a radiation source. The collision radiative model is applied to calculate the corresponding dynamics of Ar excited states in the afterglow with electron density and temperature obtained from self-consistent particle in cell simulation. Different temporal dynamics for metastable and for resonance states densities are revealed and explained. The numerical results and experimental data on Ar excited state dynamics are in good agreement with each other. The decrease in vacuum ultraviolet photon fluxes from the discharge to the substrate is shown. The possible damage free time for plasma treatment of specific dielectric film in a pulsed discharge regime is estimated.