Mechanical properties of poly-methyl methacrylate (PMMA) for nano imprint lithography

Abstract

Mechanical property of a polymer over glass transition temperature is an important factor to design process conditions in nano imprint lithography or nano embossing technology. Mechanical properties such as shear modulus, retardation time and viscosity are experimentally evaluated for poly methyl methacrylate (PMMA) for various molecular weights (12k to 996k) over 100°C. Also, dependency on the shearing strain rate is evaluated using WLF law. Based on the results, process conditions are discussed for nano imprint lithography and experimentally demonstrated high aspect ratio pattern.