3D Imaging and Quantitative Subsurface Dielectric Constant Measurement Using Peak Force Kelvin Probe Force Microscopy

Abstract

Noninvasive and depth-sensitive measurements of dielectric properties are becoming of great interest in advanced and complex nanostructured architectures. Here, a straightforward parallel approach applicable in peak force Kelvin probe force microscopy for a 3D measurement of dielectric constants at the nanoscale is demonstrated. The proposed approach features a simultaneous measurement of the mechanical, electrical, and depth-dependent dielectric properties applied to embedded nanostructures. The findings provide initial elements for further development of experimental dielectric nano-tomography methods for characterizing buried and embedded systems and dielectric interfaces.