MIM capacitor simple scalable model determination for MMIC application on gaas

Abstract

An efficient metal-insulator-metal (MIM) capacitor simple scalable model for use in monolithic-microwave integrated circuit (MMIC) design is presented in this paper. This model is based on transmission-line theory. Analytical expressions based on physical parameters have been given in detail. Nine different physical dimension capacitors are fabricated to verify the validity of the proposed model. A good agreement between measured result and simulated data is obtained.