A planar nano-positioner driven by shear piezoelectric actuators

Abstract

A planar nano-positioner driven by the shear piezoelectric actuators is proposed in this paper based on inertial sliding theory. The performance of the nano-positioner actuated by different driving signals is analyzed and discussed, e.g. the resolution and the average velocity which depend on the frequency, the amplitude and the wave form of the driving curves. Based on the proposed design, a prototype system of the nano-positioner is developed by using a capacitive sensor as the measurement device. The experiment results show that the proposed nano-positioner is capable of outputting two-dimensional motions within an area of 10 mm × 10 mm at a maximum speed of 0.25 mm/s. The corresponding resolution can be as small as 21 nm. The methodology outlined in this paper can be employed and extended to shear piezoelectric actuators involved in high precision positioning systems.