2-D Scanning Galvanometer Error Analysis and Its Correction

Abstract

The 2-D Scanning Galvanometer is an optical scanner with high precision, high reliability and high repeatability. It is also widely used. In order to eliminate the nonlinear scanning error of the 2-D Scanning Galvanometer system, in order to improve the scanning precision of the system, the theoretical distortion is derived, and the geometric distortion and various errors in the 2-D Scanning Galvanometer system are analyzed in detail. The targeted coordinate transformation method is used to correct the distortion error. The experiment proves that the method can significantly improve the scanning precision of the rapid prototyping machine.