The impacts of surface conditions on the vapor-liquid-solid growth of germanium nanowires on Si (100) substrate

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Abstract

The impacts of surface conditions on the growth of Ge nanowires on a Si (100) substrate are discussed in detail. On Si O2 -terminated Si substrates, high-density Ge nanowires can be easily grown. However, on H-terminated Si substrates, growing Ge nanowires is more complex. The silicon migration and the formation of a native Si O2 overlayer on a catalyst surface retard the growth of Ge nanowires. After removing this overlayer in the HF solution, high-density and well-ordered Ge nanowires are grown. Ge nanowires cross vertically and form two sets of parallel nanowires. It is found that nanowires grew along 〈110〉 directions. © 2008 American Institute of Physics.

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Li, C. B., Usami, K., Muraki, T., Mizuta, H., & Odal, S. (2008). The impacts of surface conditions on the vapor-liquid-solid growth of germanium nanowires on Si (100) substrate. Applied Physics Letters, 93(4). https://doi.org/10.1063/1.2968201

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