Efficient replication of nanostructured surfaces

Abstract

The defined fabrication of nanostructures on surfaces for the nanosciences today largely relies on tools such as scanning probe instruments or electron- and ion beam systems that are serial writing processes. For future production of components and devices, in particular if large nanostructured areas are needed, parallel processes, which are fast and cost-effective, have to be developed. In this paper we review the possibilities for the replication of nanostructures on surfaces using moulding of thermoplastic polymer materials. Using hot embossing, it has been shown that structures below 10 nm can be reproduced reliably and with a high fidelity using laboratory equipment. Mass fabrication of nanostructured components can be achieved using thermal injection moulding with cycle times in the order of 10 sec.