High-Speed Visual Feedback Control of Miniature Rotating Mirror System Using a Micro Ultrasonic Motor

Abstract

We propose a miniature rotating mirror system using a micro-ultrasonic motor that employs a 45° angle mirror as its rotor for enlarging the angle of view of cameras. The motor assy, measuring 2 mm in diameter and 4 mm in length, is one of the smallest motors and is expected for medical applications such as endoscopes. In this paper, we build a micromirror assembly, install it into a visual feedback system with an optical system, and demonstrate a motor control with a quick and wide angle-of-view observation. The high-speed camera vision embedded in the system measures the quick motion of the motor in real-time and enables accurate positioning of the mirror angle by p-control using burst waves. The proposed system demonstrates the visual feedback control of the miniature rotating mirror to the angle information obtained by the high-speed camera. The feasibility of the mirror system driven by the micro-ultrasonic motor is shown via demonstration.