Optimization of linear transducer calibration system using laser interferometer based on the Abbe principle

Abstract

The validity of the measurement results can be guaranteed by performing calibration using a measurement standard traced to the international system of units (SI). The linear transducer is a measurement standard that is used to calibrate calibration tester, dial gauge tester, and gauge block in the calibration and testing laboratories. The critical position of the linear transducer in the traceability chain leads to the need for an optimal system to calibrate it with the smallest error and highest accuracy. As an optimization step, this research was carried out to improve linear transducer calibration performance using a laser interferometer combined with a universal length machine (ULM). The laser interferometer, ULM, and linear transducer were aligned with the Abbe and cosine principles. The results show a significant reduction of the linear transducer measurement error in the forward and backward directions by 548% and 119%, respectively. The measurement uncertainty could also be decreased by 8% to 0.18 µm.