This work provides a detailed study on the growth of AlxIn1-xAsySb1-y lattice-matched to InAs by Molecular Beam Epitaxy. In order to find the conditions which lead to high crystal quality deep within the miscibility gap, AlxIn1-xAsySb1-y with x = 0.462 was grown at different growth temperatures as well as As2 and Sb2 beam equivalent pressures. The crystal quality of the grown layers was examined by high-resolution X-ray diffraction and atomic force microscopy. It was found that the incorporation of Sb into Al0.462In0.538AsySb1-y is strongly temperature-dependent and reduced growth temperatures are necessary in order to achieve significant Sb mole fractions in the grown layers. At 480 °C lattice matching to InAs could not be achieved. At 410 °C lattice matching was possible and high quality films of Al0.462In0.538AsySb1-y were obtained.
CITATION STYLE
Zederbauer, T., Andrews, A. M., MacFarland, D., Detz, H., Schrenk, W., & Strasser, G. (2016). Enhanced crystal quality of AlxIn1-xAsySb1-y for terahertz quantum cascade lasers. Photonics, 3(2). https://doi.org/10.3390/photonics3020020
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