Conference Proceedings

Closed-loop adaptive control for torsional micromirrors

  • Liao K
  • Wang Y
  • Yeh C
  • et al.
MOEMS and Miniaturized Systems IV (2004) 5346 184
DOI: 10.1117/12.524691
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Liao, K.-M., Wang, Y.-C., Yeh, C.-H., & Chen, R. (2004). Closed-loop adaptive control for torsional micromirrors. In MOEMS and Miniaturized Systems IV (Vol. 5346, p. 184). SPIE. https://doi.org/10.1117/12.524691

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