Deposition of TiN-WS2 nanocomposite coatings by a hybrid process: Reactive sputtering and clusters gun

Abstract

A de magnetron reactive sputtering equipment connected with a homemade clusters gun was used to deposit a series of TiN-WS2 nanocomposite coatings with different magnetron power values and different argon pressures in the clusters gun. The original idea was to achieve from the TiN matrix, originated from the normal running of the magnetron system, the high wear resistance property, whereas the pre-formed IF-WS2 nanospheres introduced by the clusters gun would provide the low friction coefficient. A small peak detected at low diffraction angles by X-ray diffraction in two of the produced samples gave the first evidence of the WS2 nanospheres incorporation in the TiN matrix. Then, scanning electron microscopy was used for observing very small grain features which were identified as the WS2 nanospheres by energy dispersive analysis of X-rays, demonstrating the feasibility of this hybrid technique for the deposition of nanocomposite coatings © 2009 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.