Abstract
A novel pressure sensor based on the Fabry-Perot interferometry and microelectromechanical system (MEMS) technology is proposed and demonstrated. Light is coupled into the sensor through a fiber. Dual-wavelength demodulation method is used to analyze the reflected optical signals and compensate the errors independent of optical wavelength. Theoretical analysis and simulation results are presented. Experimental results for pressure measurements ranging from 0 Mpa to 3 Mpa demonstrate reasonable linearity and sensitivity. © 2006 IOP Publishing Ltd.
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CITATION STYLE
Ni, X. Q., Wang, M., Chen, X. X., Ge, Y. X., & Rong, H. (2006). A novel optical fibers MEMS pressure sensor. Journal of Physics: Conference Series, 34(1), 996–1001. https://doi.org/10.1088/1742-6596/34/1/165
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