Advances in valveless piezoelectric pumps

Abstract

Piezoelectric pump design is regarded as a hot research topic in the microfluidic field, and has been applied in liquid cooling, precision machinery and other relevant domains. The valveless piezoelectric pump becomes an important branch of the piezoelectric pump, because it successfully avoids the problem of “pump-lagging of valve” during the valve piezoelectric pump processing. This paper summarizes the development of valveless piezoelectric pumps, and introduces some different configurations of valveless piezoelectric pumps. The structure and material of all kinds of valveless piezoelectric pumps are elaborated in detail, and also the output performance of the pump is evaluated and analyzed with the variations in flow rate and output pressure as reference. By comparing the flow of different types of valveless piezoelectric pumps, the application of valveless piezoelectric pumps is also illustrated. The development tendency of the valveless piezoelectric pump is prospected from the perspective of structure design and machining methods, which is expected to provide novel ideas and guidance for future research.