Mechanism of the flexural resonance frequency shift of a piezoelectric microcantilever sensor in a dc bias electric field

Abstract

The flexural resonance frequency of a lead magnesium niobate–lead titanate (PMN-PT)/tin piezoelectric microcantilever sensor (PEMS) was shown to vary in a dc bias electric field, similar to the behavior of width-mode resonance frequency of the PEMS. Both the flexural and the width-mode resonance frequency shifts were attributed to Young’s modulus change in the PMN-PT layer as confirmed by Young’s modulus measurements on a separate PMN-PT strip. Young’s modulus change of the PMN-PT layer in an electric field was a result of the non-180° polarization domain switching as evidenced by the dielectric constant change with the field.