Journal Article

Highly Manufacturable Deep (Sub-Millimeter) Etching Enabled High Aspect Ratio Complex Geometry Lego-Like Silicon Electronics

Small (2017) 13(16)
DOI: 10.1002/smll.201601801
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Ghoneim, M. T., & Hussain, M. M. (2017). Highly Manufacturable Deep (Sub-Millimeter) Etching Enabled High Aspect Ratio Complex Geometry Lego-Like Silicon Electronics. Small, 13(16). https://doi.org/10.1002/smll.201601801

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