Carbon dioxide dissociation in non-thermal radiofrequency and microwave plasma

Abstract

We have studied carbon dioxide dissociation in inductively coupled radiofrequency plasma and microwave plasma at low gas pressure. Both systems exhibit features of non-thermal plasma. The highest energy efficiency observed is 59.3% (2.13 mmol kJ-1), exceeding the maximum value of about 45% in case of thermodynamic equilibrium, and a maximum conversion of 80.6% is achieved. Different discharge conditions, such as the source frequency, discharge gas pressure and the addition of argon, will affect the plasma parameters, especially the electron energy distribution. This plays a great role in the energy transfer from non-thermal plasma to the molecular dissociation reaction channel by enabling the ladder climbing of the carbon dioxide molecular vibration. The results indicate the importance of ladder climbing.