High-Q out-of-plane Mie electric dipole surface lattice resonances in silicon metasurfaces

Abstract

Metasurfaces supporting surface lattice resonances (SLRs) with narrow linewidths and high quality factors have become an exciting platform for diverse applications. Here we numerically show, for the first time, that narrowband out-of-plane Mie electric dipole SLRs (ED-SLRs) can be excited together with the in-plane ED-SLRs and magnetic-dipole SLRs in periodic silicon disks under oblique incidence with TM polarization. Simulation results show that the out-of-plane ED-SLR can have four times larger quality factors than the in-plane one under the same excitation conditions, and can have distinct near-field distributions and dispersion relationships compared with the plasmonic counterpart in periodic metallic nanodisks. We further show that the out-of-plane ED-SLR can define a symmetry-protected bound state in the continuum (BIC) at normal incidence, which transits into a quasi-BIC when the excitation field symmetry is slightly broken by the small incidence angle. We expect this work will advance the engineering of Mie SLRs for applications in metasurface-based nanolasers, nonlinear optics, and optical sensing.