Fully Transparent and Highly Sensitive pH Sensor Based on an a-IGZO Thin-Film Transistor with Coplanar Dual-Gate on Flexible Polyimide Substrates

Abstract

In this paper, we propose a fully transparent and flexible high-performance pH sensor based on an amorphous indium gallium zinc oxide (a-IGZO) thin-film transistor (TFT) transducer with a coplanar dual-gate structure on polyimide substrates. The proposed pH sensor system features a transducer unit consisting of a floating gate (FG), sensing gate (SG), and control gate (CG) on a polyimide (PI), and an extended gate (EG) sensing unit on a separate glass substrate. We designed a capacitive coupling between (SG) and (CG) through the FG of an a-IGZO TFT transducer to contribute to sensitivity amplification. The capacitance ratio (CSG/CCG) increases linearly with the area ratio; therefore, the amplification ratio of the pH sensitivity was easily controlled using the area ratio of SG/CG. The proposed sensor system improved the pH sensitivity by up to 359.28 mV/pH (CSG/CCG = 6.16) at room temperature (300 K), which is significantly larger than the Nernstian limit of 59.14 mV/pH. In addition, the non-ideal behavior, including hysteresis and drift effects, was evaluated to ensure stability and reliability. The amplification of sensitivity based on capacitive coupling was much higher than the increase in the hysteresis voltage and drift rate. Furthermore, we verified the flexibility of the a-IGZO coplanar dual-gate TFT transducer through a bending test, and the electrical properties were maintained without mechanical damage, even after repeated bending. Therefore, the proposed fully transparent and highly sensitive a-IGZO coplanar dual-gate TFT-based pH sensor could be a promising wearable and portable high-performance chemical sensor platform.