Thin film microsensing elements, technology and application in microsystems for environment control

Abstract

In this paper microsensing elements with thin piezoelectric films are presented. Three different materials from the basic types-ceramic, metal oxide and polymer, in microsystems for environment parameters control are used. Zinc oxide (ZnO) and lead zirconium titanate (PZT) by sputtering technology from hot targets are deposited. The optimal parameters of the process and thickness of the layers are presented. Layers of piezoelectrical polymer poly (vinylidene fluoride) (PVDF) were prepared by spray deposition technique. The microelements (MEMS) with these piezoelectric films are proposed for direct and indirect measuring of parameters as pressure, vibration, gas and liquid sensing, fluid flow, etc.