An on-pole-piece-tip deflector for high-resolution, low-voltage scanning electron microscopes

Abstract

A proposal to enlarge the field of view of low-voltage, high-resolution scanning electron microscopes is presented in this paper. The proposal is based upon mounting primary beam deflectors onto the pole tip of the objective lens. Simulation results show that this compact arrangement of beam deflection should widen the present attainable field of view at probe resolutions < 5 nm by over an order of magnitude.