Antireflection microstructured surface on ZnSe for mid-infrared spectral region

Abstract

Antireflection microstructured surface were fabricated on ZnSe through a rapid and scalable method which was called femtosecond laser direct writing (FsLDW). With this technology, microm-eter level inverted pyramid and cone arrays were fabricated precisely. The measured transmittance were about 11.3% higher compared with the plain ZnSe at 9μm in the ideal situation. These results were in good accord with the simulations which were calculated by geometric and diffractive field tracing techniques.