Sputtered SnO2/ZnO heterostructures for improved NO2 gas sensing properties

Abstract

A highly sensitive and selective NO2 gas sensor dependent on SnO2/ZnO heterostructures was fabricated using a sputtering process. The SnO2/ZnO heterostructure thin film samples were characterized by field emission scanning electron microscopy (FESEM), X-ray diffraction (XRD), Energy-dispersive X-ray spectroscopy (EDS), and X-ray photoelectron spectroscopy (XPS). Sensors fabricated with heterostructures attained higher gas response (S = 66.9) and quicker response-recovery (20 s, 45 s) characteristics at 100 °C operating temperature towards 100 ppm NO2 gas efficiently in comparison to sensors based on their mono-counterparts. The selectivity and stability of SnO2/ZnO heterostructures were studied. The more desirable sensing mechanism of SnO2/ZnO heterostructures towards NO2 was described in detail.