Journal ArticleOPEN ACCESS

21am2-A6 Developments of thin film temperature and humidity sensors for PEMFC in-situ measurements

  • Kim S
  • Sugimoto T
  • Araki T
The Proceedings of the Symposium on Micro-Nano Science and Technology (2014) 2014.6(0) _21am2-A6--_21am2-A6-
DOI: 10.1299/jsmemnm.2014.6._21am2-a6-
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Kim, S., Sugimoto, T., & Araki, T. (2014). 21am2-A6 Developments of thin film temperature and humidity sensors for PEMFC in-situ measurements. The Proceedings of the Symposium on Micro-Nano Science and Technology, 2014.6(0), _21am2-A6--_21am2-A6-. https://doi.org/10.1299/jsmemnm.2014.6._21am2-a6-

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