Abstract
In this study, the fabrication and sensing response of humidity sensor based on the polyaniline (PANI) thin film have been studied. PANI thin films with 30-70 μm thickness were deposited on glass substrates between pre-deposited silver and gold electrodes. It was found that the sensing mechanism is based on the impedance and capacitance variations. For change in Relative Humidity (RH) from 36 to 90%, the change in sensor's capacitance and impedance is 167 and 471 times, respectively. The impedance-humidity relationship is more uniform as compared to capacitance-humidity relationship for this range of humidity. It is also observed that annealing enhanced the sensitivity of the sensor by two times. The consequence of measuring frequency and absorption-desorption behavior of the humidity sensor are also discussed in detail. Response (τres) and recovery (τrec) times are 8 and 27 s respectively. Results are examined by simulation and found in good agreement with experimental data. © 2013 Elsevier Ltd. All rights reserved.
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Chani, M. T. S., Karimov, K. S., Khalid, F. A., & Moiz, S. A. (2013). Polyaniline based impedance humidity sensors. Solid State Sciences, 18, 78–82. https://doi.org/10.1016/j.solidstatesciences.2013.01.005
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