Design and analysis of series configuration-based mems switch

Abstract

This paper reports the design and analysis of series type MEMS switch. This switch can be used for tunable filter applications from DC-10GHz frequency range. The study briefly explains the design of switch and analysis of various switching parameters. Through electrostatic actuation mechanism the switch is optimized in terms of various parameters like beam thickness, beam width, airgap, conductor and dielectric materials. Study of proposed design with COMSOL for electromechanical analysis and HFSS for electromagnetic analysis. The switch has theoretical and simulated actuation voltages of 22.81V and 38V respectively. It has the switching time of 33.36µs. The upstate and down state capacitances of 0.286pF, 3.93fF respectively. When the switch is in ON state an insertion loss of less than-0.1dB and return loss of-15dB is achieved. When the switch is in OFF state an isolation loss of-0.1dB and return loss of-21dB is achieved at 3GHz.