Amorphous In–Ga–Zn–O powder with high gas selectivity towards wide range concentration of C2H5OH

Abstract

Amorphous indium gallium zinc oxide (a-IGZO) powder was prepared by typical solution-based process and post-annealing process. The sample was used as sensor for detecting C2H5OH, H2, and CO. Gas-sensing performance was found to be highly sensitive to C2H5OH gas in a wide range of concentration (0.5–1250 ppm) with the response of 2.0 towards 0.5 ppm and 89.2 towards 1250 ppm. Obvious difference of response towards C2H5OH, H2, and CO was found that the response e.g., was 33.20, 6.64, and 2.84 respectively at the concentration of 200 ppm. The response time and recovery time of was 32 s and 14 s respectively towards 200 ppm concentration of C2H5OH gas under heating voltage of 6.5 V.