Instrumentation and control of an aerosol-assisted chemical vapor deposition system (AACVD)

Abstract

Aerosol-assisted chemical vapor deposition (AACVD) is a technique that implicates the atomization of a precursor solution into fine droplets which are dragged by a hot air flow through a mobile nozzle to a heated reaction zone where chemical reactions occur. This work presents a description of the implementation of the mechanical, electrical and electronic components for AACVD. Equipment and experimental methods implemented are described, together with the nozzle automatization criteria, temperature control for the heating plate and nebulizing system. The flowchart, the logical sequence of the speed control programming and statistical analysis of the nozzle movement control were completed and checked. An adequate link was therefore achieved between the diverse components using Arduino with the design and automatization criteria. Finally, we conclude that the criteria and automatization process used allowed successful production of uniform and reproducible coatings.