Infrared absorption and nuclear magnetic resonance studies of carbon nitride thin films prepared by reactive magnetron sputtering

Abstract

Carbon nitride thin films were prepared by dc magnetron sputtering of a graphite target in a nitrogen containing gas mixture onto Si(100) substrates held at ambient temperatures. All CNx coatings grown to a thickness of 1.5 μm are adherent and smooth. Infrared absorption and isotropic nitrogen labeling indicate that carbon and nitrogen are chemically bonded together. Both solid-state 13C and 15N magic angle spinning nuclear magnetic resonance (NMR) analyses were performed. NMR measurements indicate the presence of sp2 bonded C and N.