Abstract
The three-dimensional assembly of poly (styrene-b-methyl methacrylate) (PS-b-PMMA) in chemoepitaxy and graphoepitaxy directed self-assembly (DSA) was investigated using scanning transmission electron microscopy (STEM) tomography. The tomographic characterization revealed hidden morphologies and defects at the BCP- chemical pattern interface in lamellar DSA, and probed the formation of cylinders at the bottom of cylindrical DSA for contact hole shrink. Future work will include control over 3D assembly in sub-10 nm processes.
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Segal-Peretz, T., Zhou, C., Ren, J., Dazai, T., Ocola, L. E., Divan, R. N. S., & Nealey, P. F. (2016). Three dimensional assembly in directed self-assembly of block copolymers. Journal of Photopolymer Science and Technology, 29(5), 653–657. https://doi.org/10.2494/photopolymer.29.653
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