A biologically inspired silicon differential microphone with active Q control and optical sensing

Abstract

A MEMS differential microphone is described in which the diaphragm design is inspired by the mechanics of directional hearing in the fly O. ochracea. The 1 mm by 3 mm diaphragm is designed to rotate about a central pivot in response to sound pressure gradients. The diaphragm is designed to have its dominant resonance mode within the audible frequency range and to have as little viscous damping as possible (to minimize the effects of thermal noise). The motion of the diaphragm is detected using an optical sensing scheme that includes a semiconductor laser (VCSEL), photodetectors, a mirror, and a diffraction grating. To minimize the adverse effects of the light damping on the response, an active feedback system is implemented to achieve active Q control. This uses the output of the optical detection scheme to drive the diaphragm through a capacitive actuator. The microphone and optoelectronics are packaged into an assembly that can be incorporated into a mock behind-the-ear hearing aid. The microphone is shown to achieve a noise floor that is approximately 17 dBA lower than what can be achieved using a pair of existing low noise hearing aid microphones to create a directional hearing aid. © 2013 Acoustical Society of America.