Study on crystalline structural phase transition of VO2 films grown on c-Al2O3 substrate against temperature

Abstract

We demonstrated lattice parameters of vanadium dioxide (VO2) films grown on A12O3 (001) single crystals across metal-insulator transition through temperature-controlled X-ray diffraction measurements. Changes of lattice length for both monoclinic and tetragonal phases were analyzed against temperature. Films prepared by reactive sputtering method were examined to discuss the dependence of transition property on lattice parameters. We revealed correlation between transition temperature and c-axis length of tetragonal phase.