Cleaning the surface of products with glow discharge plasma

Abstract

The paper presents a method for cleaning the surface of products by plasma glow ions. Before applying vacuum-plasma coating methods. The foundations of the evaluation method are formed. Methods of quality control of preparing the treated surface for the coating process based on IR spectra and Raman spectra (Raman spectra) obtained by analytical studies of the surface state of the samples are presented. Based on the analysis of the intensities of the IR and Raman spectra, the dependence of the degree of surface purity of the samples on the cleaning method used is demonstrated.