Focused ion beams from GaBiLi liquid metal alloy ion sources for nanofabrication and ion imaging

Abstract

In this work, we present an overview of nanopatterning and imaging applications using newly developed workflows with focused ion beams (FIBs) produced with a GaBiLi liquid metal alloy ion source. The primary beam of this source type contains gallium, bismuth, and lithium as well as cluster ions which can be separated quickly using a Wien filter. Lithium ion milling has been applied to generate heptamer-arranged nanohole arrays in gold films with high resolution. Workflows for two-step bowtie nanofabrication using lithium and bismuth ions from the same source have been established. Furthermore, we present ion beam imaging results that were obtained with lithium ions on various sample materials. Combining the large sputter yield and high depth resolution of heavy bismuth ions with the high lateral imaging resolution of light lithium ions enables 3D nanoscale tomography using different ion species generated from the same source. Sample tilt is not required due to the top-down geometry of the FIB.