Surface modifications induced by high fluxes of low energy helium ions

Abstract

Several metal surfaces, such as titanium, aluminum and copper, were exposed to high fluxes (in the range of 10 23 m -2 s -1) of low energy (<100 eV) Helium (He) ions. The surfaces were analyzed by scanning electron microscopy and to get a better understanding on morphology changes both top view and cross sectional images were taken. Different surface modifications, such as voids and nano pillars, are observed on these metals. The differences and similarities in the development of surface morphologies are discussed in terms of the material properties and compared with the results of similar experimental studies. The results show that He ions induced void growth and physical sputtering play a significant role in surface modification using high fluxes of low energy He ions.