Fresnel zone-plate based X-ray microscopy in Zernike phase contrast with sub-50 nm resolution at NSRL

Abstract

A transmission X-ray microscope using Fresnel zone-plates (FZPs) has been installed at U7A beamline of National Synchrotron Radiation Laboratory (NSRL). The objective FZP with 45 nm outermost zone width delivers a sub-50 nm resolution. A gold phase ring with 2.5 μm thickness and 4 μm width was placed at the focal plane of the objective FZP at 8 keV to produce a negative Zernike phase contrast. A series of samples were used to test the performance of the Zernike phase contrast X-ray microscopy. © 2009 IOP Publishing Ltd.